Features
l
Seamless integration of conventional
contact profile meter and scanning probe microscope ( SPM)
technology
l Dual
mode operation (tip scan and stage scan) optimized for small area 3D mapping as well as longrange
profiling
l Precision
piezo driven tip scan mode provides 3D scan range from
10um x 10um up to 500um x 500um, while
the high grade optical
reference flat enables long range scan up
to 50mm
l Integrated
color optical camera for direct sample viewing during
scanning
l Wide
measurement dynamic range (up to 500um) as a result of the
dual optical sensors
l Constant contact force settable by
software
l Integrated vibration isolation platform
for ultimate noise performance
l Simple 2-key operation with user friendly
software interface
Applications
l
3D surface profiling and roughness
measurement from finely polished optical surfaces
to coarsely machined parts
l Thin and
thick film step heights measurement
l Quantify
scratch and dig features, wear depth, width and volume
l Dimensional
analysis and surface texture characterization
l Flatness
or curvature measurement
l 2D thin
film stress measurement
l Micro
electronics surface analysis and MEMS device surface profilingSurface defect
inspection
cility and Environment
l Humidity:
10-80%, relative humidity, non-condensing
l
Temperature: 65-85 Fahrenheit (ΔT < 1
degree/hour)
l
Power Requirements: 110/240 VAC, 50/60 Hz
Technical
specifications of Optical Profiler(옵틱센서)
 
Performance(White Light Interferrometer)
Contents
|
Specification
|
|
RMS Z scan
repeatability (Phase-Shift mode)
|
|
0.1nm
|
|
RMS Z scan
repeatability (Standard mode)
|
|
1nm
|
|
XY surface
sampling
|
|
|
|
0.11 to 8.8um
|
|
Z working
distance
|
|
|
|
up to 10mm
|
|
Z scan speed
|
|
|
|
up to 7.2um/sec
|
|
Reflectivity
|
|
|
|
|
1 to 100%
|
|
Digitized
resolution
|
|
|
|
1024 x 1024pixels
|
|
XY stage
movement range
|
|
|
100x100mm
|
|
Tip-tilt range
|
|
|
|
|
+/-7degrees
|
|
Manual
rotation stage range
|
|
|
360degrees
|
|
Maximum slope
|
|
|
|
40 to 3.2degrees
|
|
Calibrated
accuracy
|
|
|
|
≤ 0.1%
|
***수직 측정범위 : 30µm/100µm/5mm~10mm(측정범위에 따라, 수직측정 분해능 0.1nm/1nm/1micron
으로 달라짐,세가지 측정범위의 센서능력)
Magnification
|
Objective Magnification
|
50x
|
10x
|
5x
|
|
Numerical aperture
|
0.55
|
0.30
|
0.13
|
|
XY measurement area (μm)
|
102.4 x 102.4
|
512x512
|
1024x1024
|
|
XY spatial sampling (μm)
|
0.1
|
0.5
|
1
|
|
XY optical resolution @550nm (μm)
|
0.50
|
0.92
|
2.12
|
|
Z working distance (mm)
|
3.4
|
7.4
|
9.3
|
|
Depth of focus @550nm (μm)
|
1.16
|
3.89
|
20.72
|
|
Degrees of maximum surface Slope
|
22.6
|
4.8
|
2.4
|
Technical specifications of Contact Profiler(접촉식센서)
Performance(Contact Profiler)
|
Category
|
Item
|
Specification
|
|
General
|
Software
controllable stylus force range
|
0.1 to 100mg
|
|
Stylus tip
radius standard
|
5um
|
|
Stylus tip
radius options
|
0.1-0.8, 2,
12.5, 25um
|
|
Full time color CCD
camera with bright and dark field illumination(샘플표면 조망용 카메라)
|
FOV:1.5 x 1.5mm(512 x 512 pixels), 배율 60~120X
|
|
Tip Scan
(Piezo Scanner)
상부 stage
---->SPM과 유사한 측정 정밀도
|
Z scan
repeatability
|
0.8nm
|
|
Z scan
resolution
|
0.1nm
|
|
Z scan fine
range
|
5um
|
|
Z scan coarse
range
|
500um
|
|
XY scan
resolution
|
0.1um
|
|
XY scan
position repeatability
|
0.2um
|
|
XY scan speed
|
10 to 50um/sec
|
|
XY scan range
|
500um x 500um
|
|
Data point per
scan
|
100 to 1000points
|
|
Glass Stage Scan
하부 stage
--->알파스텝중 최상위 버전인 전자동 Stage 이동 측정과 3차원측정 기능.
|
XY sample area
|
100mm x 100mm
|
|
XY stage
movement range
|
100mm x 100mm
|
|
XY stage
position repeatability
|
5um
|
|
XY scan range
|
50mm x 50mm
|
|
XY scan speed
|
0.1 to 5mm/sec
|
|
Z stage
movement range
|
55mm
|
|
Z scan fine
range
|
5um
|
|
Z scan coarse
range
|
500um
|
|
Maximum sample
height
|
50mm
|
|
Manual
rotation stage range
|
360degrees
|
|
Manual tilt
stage range
|
+/-7degrees
|
|
System
|
Step height
standards
|
100um
|
|
Computer
|
Pentium IV
based PC
with USB2.0
connections
|
|
Operating
System
|
Window XP
|
|
System power
requirement
|
90-240V AC
350Watt
|
|
Gross Weight
and Dimensions
|
BOX1: Wood 30”W
x 40”L x 20”H, 150kg
|
|
BOX2:
Cardboard 18”W x 24”L x 18”H, 30kg
|
Facility and Environment
l Humidity:
10-80%, relative humidity, non-condensing
l
Temperature: 65-85 Fahrenheit (ΔT < 1
degree/hour)
l Power Requirements: 110/240 VAC, 50/60 Hz
| 
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