AEP사 생산라인 고속적용 3차원 측정 센서

생산라인 적용 고속 3차원 측정기

LCD,WAFER,자동차,전자부품,BGA,PCB, 도장등에 표면의 결함및 검사용으로, 3차원 고속 검사를 원할 경우, 미국 AEP(실리콘밸리소재)사에서는 적용분야에 맞는 Sensor Solutioin을 제공 합니다.

The dimension of the optical profiler head is shown on the left. A single objective is illustrated.

•The weight of the head is about 5 kg.

•The working distance between the objective and the test sample is magnification depended, which ranges from 2mm to 10mm.

•Objective magnifications

–2.5X, 5X, 10X, 20X, 50X, 100X

•Measurement resolution

–1024 x 1024, 512 x 512, 256 x 256

•Reflectivity range

–1% to 100%

•Z measurement range

–100um

•Vertical resolution

–0.1nm

•RMS repeatability

–0.05nm

•Step height repeatability

–0.1% @ 1s